Lee, E.-H. ; Lee, S. G. ; O, B. H. ; Park, S. G. ; Kim, K. H. ; Kong, J. K. ; Chin, I. ; Kwon, Y. K. ; Choi, Y. W.
Pub. info.:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.102-113, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering