1.

Technical Paper
Technical Paper
1. Reliability-Based Topology Optimization of Laser Scanned Model
Kim, C. ; Wang, S. ; Kang, E. ; Lee, K.
Pub. info.: AIAA meeting papers on disc.  2004.  [Reston, Va.].  American Institute of Aeronautics and Astronautics
Title of ser.: AIAA Paper : Multidisciplinary Analysis and Optimization Conference
Ser. no.: 10th
2.

Conference Proceedings
Conference Proceedings
2. Improvement of alignment and overlay accuracy on amorphous carbon layers [6152-73]
Hwang, Y. S. ; Kang, E. ; Lee, K. ; Ban, K. D ; Bok, C. K. ; Lim, C. M. ; Kim, H. S ; Moon, S. C.
Pub. info.: Metrology, Inspection, and Process Control for Microlithography XX.  pp.615222-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6152