Cheng, K. ; Lee, J. ; Lyding, J. W. ; Salemink, H. W. M.
Pub. info.:
Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A.. pp.A26.8-, 2001. Warrendale. Materials Research Society
Defect and impurity engineered semiconductors, II : symposium held April 13-17, 1998, San Francisco, California, U.S.A.. pp.301-, 1998. Warrendale, Pa. MRS - Materials Research Society
Lyding, J. W. ; Lee, J. ; Cheng, K. ; Albrecht, P. M. ; Ruppalt, L. B. ; Hess, K.
Pub. info.:
Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France. pp.135-143, 2005. Pennington, N.J.. Electrochemical Society