Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.47-53, 2000. Pennington, N.J.. Electrochemical Society
Copper Interconnects, New Contact Metallurgies/Structures, and Low-K Interlevel Dielectrics : proceedings of the International Symposium. pp.63-68, 2000. Pennington, N.J.. Electrochemical Society