Lee, J. ; Park, J. ; Chun, M. -K. ; Lee, K. ; Lee, J. -H. ; Kang, J. -M. ; Lee, H.
Pub. info.:
Carbon dioxide utilization for global sustainability : proceedings of the 7th International Conference on Carbon Dioxide Utilization, Seoul, Korea, 12-16 October 2003. pp.209-212, 2004. Amsterdam, The Netherland. Elsevier
Lee, H. ; Bang, K.-Y. ; Lee, J. ; Bak, H. ; Sohn, Y.-S. ; An, I.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVI. Part One pp.356-363, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering