1.

Conference Proceedings
Conference Proceedings
1. Isotope Exchange In Hydrogenated Silicon-Oxynitride (SiON) For 1.55 μm Optical Waveguide Applications
Cheng, K. ; Lee, J. ; Lyding, J. W. ; Salemink, H. W. M.
Pub. info.: Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A..  pp.A26.8-,  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 609
2.

Conference Proceedings
Conference Proceedings
2. Deuterium passivation in CMOS technology (invited paper)
Lyding, J. W. ; Lee, J. ; Cheng, K. ; Albrecht, P. M. ; Ruppalt, L. B. ; Hess, K.
Pub. info.: Crystalline defects and contamination: their impact and control in device manufacturing IV : DECON 2005 : proceedings of the Satellite Symposium to ESSDERC 2005, Grenoble, France.  pp.135-143,  2005.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2005-10