1.

Conference Proceedings
Conference Proceedings
1. STUDY OF SITOX PROCESS AND ITS APPLICATION TO ADVANCED MOS DEVICES
Lin, J. ; Chen, W. ; Banerjee, S. ; Lee, J. ; Teng, C. ; Magee, C.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.623-628,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
2.

Conference Proceedings
Conference Proceedings
2. THERMAL STABILITY OF COBALT DISILICIDE FOR SELF-ALIGNED SILICIDE APPLICATIONS
Chen, W. ; Lin, J. ; Banerjee, S. ; Lee, J.
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.163-168,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260