1.

Conference Proceedings
Conference Proceedings
1. Integration of SOG/CMP Processes
Choi, D. ; Sung, B. ; Hosseini, R. ; Lee, J. ; Sutshi, A. ; Bibby, T. ; Tredinnick, B.
Pub. info.: Proceedings of the First International Symposium on Chemical Mechanical Planarization.  pp.249-257,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-22
2.

Conference Proceedings
Conference Proceedings
2. Von Mises Stress in CMP Processes
Wang, D. ; Beaudoin, S. ; Cale, T.S. ; Lee, J. ; Holland, K. ; Bibby, T.
Pub. info.: Proceedings of the First International Symposium on Chemical Mechanical Planarization.  pp.97-109,  1996.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 96-22