1.

Conference Proceedings
Conference Proceedings
1. Toward DFM: process worthy design and OPC through verification method using MEEF, TF・MEEF, and MTT [6156-21]
Kim, I.-S. ; Suh, S. ; Jung, S. ; Lee, E. ; Kang, Y.-S. ; Lee, S. ; Woo, S.-G. ; Cho, H.
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.61560L-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. Fabrication and integration of micro/nano-scale optical wire circuit arrays and devices for high-speed and compact optical printed circuit board (O-PCB) and VLSI photonic applications (Invited Paper) [5897-09]
Lee, E. ; Lee, S. G. ; Park, B. H. O, S. G. ; Kim, K. H. ; Kang, J. K. ; Choi, Y. W. ; Song, S. H.
Pub. info.: Photonics for space environments X : 1-2 August 2005, San Diego, California, USA.  pp.589709-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5897
3.

Conference Proceedings
Conference Proceedings
3. *CHEMICAL MECHANICAL POLISHING OF INTERLEVEL DIELECTRICS: MODELS FOR REMOVAL RATE AND PLANARITY
Sivaram,. S. ; Tolles, R. ; Bath, H. ; Lee, E. ; Leggett
Pub. info.: Advanced metallization and processing for semiconductor devices and circuits--II : symposium held April 27-May 1, 1992, San Francisco, California, U.S.A..  pp.53-66,  1992.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 260
4.

Conference Proceedings
Conference Proceedings
4. The Use of CMP in Making Computer Read/Write Heads
Phipps, P.B. ; Dill, F.H. ; Eschbach, F.O. ; Lee, E. ; Martin, F.
Pub. info.: Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium.  pp.381-388,  2000.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-29
5.

Conference Proceedings
Conference Proceedings
5. Particle and Process Improvements in an MERIE Dielectric Etcher
Olsen, D. A. ; DeLaurentis, E. ; Lee, E. ; Chillal, M. ; Wu, R.
Pub. info.: Proceedings of the tenth symposium on plasma processing.  pp.348-356,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-20
6.

Conference Proceedings
Conference Proceedings
6. Applications of Functional Nanocomposites
Tsakalakos, T. ; Lehman, R. L. ; Nosker, N. ; Idol, J. D. ; Renfree, R. ; Lynch, J. ; Van Ness, K. E. ; DaSilva, M. ; Wolbach, S. ; Lee, E.
Pub. info.: Nanostructures : synthesis, functional properties and applications.  pp.675-690,  2003.  Dordrecht.  Kluwer Academic Publishers
Title of ser.: NATO science series. Series 2, Mathematics, physics and chemistry
Ser. no.: 128
7.

Conference Proceedings
Conference Proceedings
7. Ultrasonic Treatment of Advanced Thermoset Composites
Grewell, D. ; Benatar, A. ; Zhou, G. ; Lee, L.J. ; Lee, E.
Pub. info.: ANTEC 2004, 62nd annual technical conference, Chicago, IL, May 16-20, 2004.  pp.1173-1176,  2004.  Brookfield Center, Conn..  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 62
8.

Conference Proceedings
Conference Proceedings
8. Efffectiveness and confirmation of local area flare measurement method in various pattern layouts
Nam, D. ; Lee, E. ; Jung, S.-G. ; Kang, Y. ; Yeo, G.-S. ; Lee, J.-H. ; Cho, H.-K. ; Han, W.-S. ; Moon, J.-T.
Pub. info.: Optical Microlithography XV.  Part One  pp.57-66,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691
9.

Conference Proceedings
Conference Proceedings
9. Fabrication and characterization of planar and channel waveguides in bismuth-based oxide glasses
Favre, A. ; Lee, E. ; Apostolopoulos, V. ; Gawith, C.B.E. ; Tai, C.-Y. ; Taylor, E.R.M. ; Kondo, Y. ; Koizumi, F.
Pub. info.: Rare-Earth-Doped Materials and Devices VII.  pp.103-110,  2003.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4990
10.

Conference Proceedings
Conference Proceedings
10. Video quality comparison on LCD monitors
Jeong, T. ; Choe, J. ; Lim, J. ; Choi, H. ; Lee, E. ; Lee, C.
Pub. info.: Image Quality and System Performance II.  pp.196-203,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5668