Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.37-43, 1996. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.18-26, 1996. Pennington, NJ. Electrochemical Society
Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A.. pp.B10.1-, 2001. Warrendale, PA. Materials Research Society
Jones, K.S. ; Banisaukis, H. ; Earles, S. ; Lindfors, C. ; Griglione, M. ; Law, M.E. ; Taiwar, S. ; Falk, S.W. ; Downey, D.F. ; Agarwal, A.
Pub. info.:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium. pp.119-128, 2000. Pennington, NJ. Electrochemical Society
Jacques, J.M. ; Burbure, N. ; Jones, K.S. ; Law, M.E. ; Robertson, L.S. ; Downey, D.F. ; Rubin, L.M. ; Bennett, J. ; Beebe, M. ; Klimov, M.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.443-448, 2004. Warrendale, Pa.. Materials Research Society
Camarce, C. ; Radic, L. ; Keys, P. ; Brindos, R ; Jones, K.S. ; Law, M.E.
Pub. info.:
Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A.. 2001. Warrendale, PA. Materials Research Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.357-362, 2004. Warrendale, Pa.. Materials Research Society
Phen, M.S. ; Crosby, R.T. ; Craciun, V. ; Jones, K.S. ; Law, M.E. ; Hansen, J.L. ; Larsen, A.N.
Pub. info.:
Semiconductor defect engineering - materials, synthetic structures and devices : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.369-376, 2005. Warrendale, Pa.. Materials Research Society
Lin, J. ; El Kouche, A. ; Law, M.E. ; Ren, F. ; Kang, B.S. ; Pearton, S.J. ; Norton, D. ; Abernathy, C.R.
Pub. info.:
State-of-the-art program on compound semiconductors (SOTAPOCS XLII) and processes at the compound-semiconductor/solution interface : proceedings of the international symposia. pp.449-460, 2005. Pennington, N.J.. Electrochemical Society
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.183-188, 2004. Warrendale, Pa.. Materials Research Society
Crosby, R.T. ; Radic, L. ; Jones, K.S. ; Law, M.E. ; Thompson, P.E. ; Liu, J. ; Klimov, M. ; Craciun, V.
Pub. info.:
Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A.. pp.313-318, 2004. Warrendale, Pa.. Materials Research Society
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.45-50, 2002. Warrendale, Pa.. Materials Research Society
Crosby, Robert ; Frazer, Jackie ; Jones, K.S. ; Law, M.E. ; Larsen, A. Nylandsted ; Hansen, J. Lundsgaard
Pub. info.:
Silicon front-end junction formation technologies : symposium held April 2-4, 2002, San Francisco, California, U.S.A.. pp.27-32, 2002. Warrendale, Pa.. Materials Research Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.407-416, 1996. Pennington, NJ. Electrochemical Society
Proceedings of the Fourth International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.374-378, 1996. Pennington, NJ. Electrochemical Society
Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology. pp.1041-1049, 1994. Pennington, NJ. Electrochemical Society
Meng, H.L. ; Chen, J. ; Robinson, H.G. ; Law, M.E. ; Slinkman, J.A. ; Jones, K.S.
Pub. info.:
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.236-242, 1993. Pennington, NJ. Electrochemical Society
Proceedings of the Third International Symposium on Process Physics and Modeling in Semiconductor Technology. pp.228-235, 1993. Pennington, NJ. Electrochemical Society
ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology. pp.32-42, 1995. Pennington, NJ. Electrochemical Society