1.

Conference Proceedings

Conference Proceedings
Camarce, C. ; Radic, L. ; Keys, P. ; Brindos, R ; Jones, K.S. ; Law, M.E.
Pub. info.: Si front-end processing -- physics and technology of dopant-defect interactions III : symposium held April 17-19, 2001, San Francisco, California, U.S.A..  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 669
2.

Conference Proceedings

Conference Proceedings
Saavedra, A.F. ; Jones, K.S. ; Radic, L. ; Law, M.E. ; Chan, K.K.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.357-362,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810
3.

Conference Proceedings

Conference Proceedings
Crosby, R.T. ; Radic, L. ; Jones, K.S. ; Law, M.E. ; Thompson, P.E. ; Liu, J. ; Klimov, M. ; Craciun, V.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.313-318,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810