1.

Conference Proceedings
Conference Proceedings
1. Study of Vacancy and Impurity Complexes in Si Solid-Phase Epitaxial Crystallization with Positron Annihilation Spectroscopy
Lindfors, C.D. ; Jones, K.S. ; Law, M.E. ; Downey, D.F. ; Murto, R.W.
Pub. info.: Si front-end processing - physics and technology of dopant-defect interactions II : symposium held April 24-27, 2000, San Francisco, California, U.S.A..  pp.B10.1-,  2001.  Warrendale, PA.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 610
2.

Conference Proceedings
Conference Proceedings
2. Exploring Alternative Annealing Methods for Shallow Junction Formation in Ion Implanted Silicon
Jones, K.S. ; Banisaukis, H. ; Earles, S. ; Lindfors, C. ; Griglione, M. ; Law, M.E. ; Taiwar, S. ; Falk, S.W. ; Downey, D.F. ; Agarwal, A.
Pub. info.: Rapid thermal and other short-time processing technologies : proceedings of the international symposium.  pp.119-128,  2000.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2000-9
3.

Conference Proceedings
Conference Proceedings
3. Enhanced Boron Diffusion in Amorphous Silicon
Jacques, J.M. ; Burbure, N. ; Jones, K.S. ; Law, M.E. ; Robertson, L.S. ; Downey, D.F. ; Rubin, L.M. ; Bennett, J. ; Beebe, M. ; Klimov, M.
Pub. info.: Silicon front-end junction formation : physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A..  pp.443-448,  2004.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 810