1.

Conference Proceedings
Conference Proceedings
1. EFFECTS OF LOW-DOSE SILICON, CARBON AND OXYGEN IMPLANTATION DAMAGE ON DIFFUSION OF PHOSPHORUS IN SILICON
Chaudhry, S. ; Law, M.E.
Pub. info.: Proceedings of the Seventh International Symposium on Silicon Materials Science and Technology.  pp.1041-1049,  1994.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 1994-10
2.

Conference Proceedings
Conference Proceedings
2. A Two-Dimensional Model for Strain from Dislocation Loops in Ion-Implanted Silicon
Chaudhry, S. ; Thompson, R.H. ; Jones, K.S. ; Law, M.E.
Pub. info.: ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology.  pp.32-42,  1995.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 95-5