1.

Conference Proceedings
Conference Proceedings
1. Effect of the End of Range Loop Layer Depth on the Evolution of {311} Defects
Raman, R. ; Law, M. E. ; Krishnamoorthy, V. ; Jones, K. S.
Pub. info.: Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A..  pp.61-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 532
2.

Conference Proceedings
Conference Proceedings
2. Effects of Arsenic Deactivation on Arsenic-Implant Induced Enhanced Diffusion in Silicon
Dokumaci, O. ; Law, M. E. ; Krishnamoorthy, V. ; Jones, K. S.
Pub. info.: Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A..  pp.167-,  1996.  Pittsburgh.  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 396