Tardif, F. ; Joly, J.P. ; Lardin, T. ; Tonti, A. ; Patruno, P. ; Levy, D. ; Sievert, W.
Pub. info.:
Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing. pp.114-122, 1993. Pennington, NJ. Electrochemical Society
Tardif, F. ; Joly, J.P. ; Lardin, T. ; Tonti, A. ; Patruno, P. ; Levy, D. ; Sievert, W.
Pub. info.:
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.85-93, 1994. Pennington, NJ. Electrochemical Society
Tardif, F. ; Lardin, T. ; Paillet, C. ; Joly, J.P. ; Fleury, A. ; Patruno, P. ; Levy, D. ; Barla, K.
Pub. info.:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing. pp.49-59, 1995. Pennington, NJ. Electrochemical Society