1.

Conference Proceedings
Conference Proceedings
1. Implementation of adaptive site optimization in model-based OPC for minimizing ripples [6156-63]
Bahnas, M. ; Al-lmam M ; Seoud, A. ; LaCour, P. ; Ragai H F
Pub. info.: Design and process integration for microelectronic manufacturing IV : 23-24 February, 2006, San Jose, California, USA.  pp.615615-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6156
2.

Conference Proceedings
Conference Proceedings
2. Improvements in post-OPC data constraints for enhanced process corrections [6154-134]
Burns, R. L. ; Cui, Y. ; Zhao, Z. ; Stobert, I. ; LaCour, P. ; Yehia, A. ; Madkour, K. ; Gheith , M. ; Seoud, A.
Pub. info.: Optical Microlithography XIX.  pp.61543G-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154