1.

Conference Proceedings
Conference Proceedings
1. Mask calibration dominated methodology for OPC matching
L. Zhu ; M. Lu ; D. King ; Y. Gu ; S. Yang
Pub. info.: Photomask technology 2007.  3  pp.67304D-1-67304D-8,  2007.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6730
2.

Conference Proceedings
Conference Proceedings
2. Propagation of ultrasound modulation scattering signal in multi-layer scattering media: simulations and experiments
L. Zhu ; H. Li ; S. Yang ; L. Chen
Pub. info.: Optics in health care and biomedical optics III : 12-15 November 2007, Beijing, China.  pp.68262F-1-68262F-7,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6826
3.

Conference Proceedings
Conference Proceedings
3. Slope-integrated methodology for OPC model calibration
L. Zhu ; M. Lu ; D. King ; Y. Gu ; S. Yang
Pub. info.: Quantum optics, optical data storage, and advanced microlithography : 12-14 November 2007, Beijing, China.  pp.682725-1-682725-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6827
4.

Conference Proceedings
Conference Proceedings
4. Layout optimization for thick-film resist overlay metrology
L. Zhu ; J. Li ; B. Zhou ; Y. Gu ; S. Yang
Pub. info.: Quantum optics, optical data storage, and advanced microlithography : 12-14 November 2007, Beijing, China.  pp.682726-1-682726-8,  2008.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6827