1.

Conference Proceedings
Conference Proceedings
1. Study on laser direct writing system for 32nm node
W. Jiang ; S. Hu ; Y. Yang ; L. Zhao ; W. Yan
Pub. info.: Design, manufacturing, and testing of micro- and nano-optical devices and systems : 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies : 19-21 November 2008, Chengdu, China.  pp.72840C-1-72840C-6,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7284
2.

Conference Proceedings
Conference Proceedings
2. Research on digital gray-tone projection lithography
J. Wang ; L. Zhao ; W. Yan ; W. Xu ; S. Hu
Pub. info.: Design, manufacturing, and testing of micro- and nano-optical devices and systems : 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies : 19-21 November 2008, Chengdu, China.  pp.728417-1-728417-4,  2009.  Bellingham, Wash..  Society of Photo-optical Instrumentation Engineers
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 7284