Raman, R. ; Law, M. E. ; Krishnamoorthy, V. ; Jones, K. S.
Pub. info.:
Silicon front-end technology--materials processing and modelling, symposium held April 13-15, 1998, San Francisco, California, U.S.A.. pp.61-, 1998. Warrendale, Pa.. MRS - Materials Research Society
Dokumaci, O. ; Law, M. E. ; Krishnamoorthy, V. ; Jones, K. S.
Pub. info.:
Ion-solid interactions for materials modification and processing : symposium held November 27-December 1, 1995, Boston, Massachusetts, U.S.A.. pp.167-, 1996. Pittsburgh. MRS - Materials Research Society