1.

Conference Proceedings
Conference Proceedings
1. Aerial image sensor for self-calibration of wafer steppers
Hagiwara,T. ; Mizutani,H. ; Kondo,N. ; Inoue,J. ; Kaneko,K. ; Higashibata,S.
Pub. info.: Optical Microlithography XIV.  4346  pp.1635-1643,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346
2.

Conference Proceedings
Conference Proceedings
2. Method to predict CD variation caused by dynamic scanning focus errors
Hagiwara,T. ; Mizutani,H. ; Okita,S. ; Kondo,N.
Pub. info.: Optical Microlithography XIV.  4346  pp.408-419,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4346