1.

Conference Proceedings
Conference Proceedings
1. *MICROFABRICATION TECHNOLOGIES FOR ADVANCED VLSI DEVICES
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.: Photon, beam, and plasma stimulated chemical processes at surfaces : symposium held December 1-4, 1986, Boston, Massachusetts, U.S.A..  pp.17-26,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 75
2.

Conference Proceedings
Conference Proceedings
2. *MICROFABRICATION TECHNOLOGIES FOR ADVANCED VLSI DEVICES
Horiike, Y. ; Yoshikawa, R. ; Okano, H. ; Nakase, M. ; Komano, H. ; Takigawa, T.
Pub. info.: Science and technology of microfabrication : symposium held December 4-5, 1986, Boston, Massachusetts, U.S.A..  pp.39-48,  1987.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 76