1.

Conference Proceedings
Conference Proceedings
1. Fine pattern replication on 10×10-mm exposure area using ETS-1 laboratory tool in HIT
Hamamoto, K. ; Watanabe, T. ; Hada, H. ; Komano, H. ; Kishimura, S. ; Okazaki, S. ; Kinoshita, H.
Pub. info.: Emerging Lithographic Technologies VI.  Part Two  pp.664-671,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4688
2.

Conference Proceedings
Conference Proceedings
2. Evaluation of resist outgassing by EUV irradiation
Hada, H. ; Watanabe, T. ; Hamamoto, K. ; Kinoshita, H. ; Komano, H.
Pub. info.: Emerging Lithographic Technologies VIII.  pp.686-694,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5374