1.

Conference Proceedings
Conference Proceedings
1. IN-SITU STRESS CONTROL DURING SPUTTER DEPOSITION
Kola, R. R. ; Miller, G. L. ; Celler, G. K.
Pub. info.: Materials aspects of x-ray lithography : symposium held April 12-14, 1993, San Francisco, California, U.S.A..  pp.275-,  1993.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 306
2.

Conference Proceedings
Conference Proceedings
2. CONTROL OF MICROSTRUCTURE AND STRESS IN SPUTTERED TUNGSTEN THIN FILMS ON SILICON
Kola, R. R. ; Celler, G. K.
Pub. info.: Mechanical behavior of materials and structures in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A..  pp.235-240,  1991.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 226