1.

Conference Proceedings
Conference Proceedings
1. Optical path and image performance monitoring of a full-field 157-nm scanner
Wells, G. ; Hermans, J. ; Watso, R. ; Kang, Y.-S. ; Morton, R. ; Kocsis, M.K. ; Okoroanyanwu, U. ; De Bisschop, P. ; Stepanenko, N. ; Ronse, K.G.
Pub. info.: Optical Microlithography XVII.  pp.91-98,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
2.

Conference Proceedings
Conference Proceedings
2. Initial assessment of the lithographic impact of the use of hard pellicles: an overview
De Bisschop, P. ; Kocsis, M.K. ; Bruls, R. ; Grenville, A. ; Van Peski, C.
Pub. info.: Optical Microlithography XVII.  pp.116-123,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377
3.

Conference Proceedings
Conference Proceedings
3. Initial assessment of the lithographic impact of the use of a hard pellicle on wafer distortion
Kocsis, M.K. ; De Bisschop, P. ; Bruls, R. ; Grenville, A. ; Van Peski, C.
Pub. info.: Optical Microlithography XVII.  pp.1679-1688,  2004.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5377