1.

Conference Proceedings

Conference Proceedings
Yokoya,Y. ; Kobayashi,H. ; Higuchi,T. ; Asakawa,K. ; Kurikawa,A. ; Sakurai,T. ; Hashimoto,M. ; Ota,F.
Pub. info.: 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany.  pp.114-119,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 3996
2.

Conference Proceedings

Conference Proceedings
Hashimoto,M. ; Kobayashi,H. ; Yokoya,Y.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.561-577,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
3.

Conference Proceedings

Conference Proceedings
Hashimoto,M. ; Ohta,F. ; Yokoya,Y. ; Kobayashi,H.
Pub. info.: 21st Annual BACUS Symposium on Photomask Technology.  4562  pp.682-693,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4562
4.

Conference Proceedings

Conference Proceedings
Yokoya,Y. ; Kobayashi,H. ; Hashimoto,M. ; Ohta,F. ; Asakawa,K.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.269-280,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
5.

Conference Proceedings

Conference Proceedings
Hashimoto,M. ; Ohta,F. ; Yokoya,Y. ; Kobayashi,H.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VIII.  pp.312-323,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4409