Optical microlithography XII : 17-19 March 1999, Santa Clara, California. Part2 pp.872-881, 1999. Bellingham, Wash., USA. SPIE - The International Society for Optical Engineering
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Proceedings of SPIE - the International Society for Optical Engineering
21st Annual BACUS Symposium on Photomask Technology. 4562 pp.1096-1103, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering