1.
|
Conference Proceedings
|
Kim,B. ; Kim,I. ; Yeo,G. ; Lee,J. ; Choi,J. ; Cho,H. ; Moon,J.
Pub. info.: |
20th Annual BACUS Symposium on Photomask Technology. pp.452-459, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4186 |
|
2.
|
Conference Proceedings
|
Park,J. ; Yeo,G. ; Kim,I. ; Kim,B.-S. ; Lee,J. ; Cho,H. ; Moon,J.T.
Pub. info.: |
Optical Microlithography XIV. 4346 pp.205-213, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4346 |
|