A collection of technical papers : 1st International Energy Conversion Engineering Conference, Portsmouth, Virginia, 17-21 August 2003. pp.420-426, 2003. American Institute of Aeronautics and Astronautics
A collection of technical papers : 21st AIAA Applied Aerodynamics Conference, Orlando, Florida, 23-26 June 2003. v. 3 pp.1889-1897, 2003. Reston, Va.. American Institute of Aeronautics and Astronautics
Hong, J. ; Woo, C. ; Park, J. ; Cho, B. ; Choi, J.-S. ; Yang, H. ; Park, C. ; Shin, Y.-C. ; Kim, Y. ; Jeong, G. ; Kim, J. ; Kang, K. ; Kang, C. ; Yim, D. ; Song, Y.
Pub. info.:
Metrology, Inspection, and Process Control for Microlithography XVII. 1 pp.406-414, 2003. Bellingham, WA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering