1.

Conference Proceedings
Conference Proceedings
1. Simulation benchmarking for the whole resist process
Kim, S.-K. ; Lee, J.-E. ; Park, S.-W. ; Yoo, J.-Y. ; Oh, H.-
Pub. info.: Data analysis and modeling for process control : 26-27 February 2004, Santa Clara, California, USA.  pp.58-64,  2004.  Bellingham, Wash., USA.  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5378
2.

Conference Proceedings
Conference Proceedings
2. Resist distribution effect of spin coating
Kim, S.-K. ; Yoo, J.-Y. ; Oh, H.-K.
Pub. info.: Optical Microlithography XV.  Part Two  pp.785-789,  2002.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4691