1.
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Conference Proceedings
|
Bok, C.K. ; Kim, S.-K. ; Kim, H.-B. ; Oh, J.-S. ; Ahn, C.-N. ; Shin, K.-S.
Pub. info.: |
Optical Microlithography XV. Part Two pp.810-821, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4691 |
|
2.
|
Conference Proceedings
|
Kim, S.-K. ; Bok, C.-K. ; Shin, K.-S.
Pub. info.: |
Optical Microlithography XV. Part Two pp.1504-1512, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4691 |
|