1.

Conference Proceedings
Conference Proceedings
1. Integration of micro/nano-scale optical waveguide arrays and devices for Optical Printed Circuit Board (O-PCB) and VLSI photonic application (Invited Paper) [5931-19]
Lee, E. -H. ; Lee, S. G. ; Park, B. H. O. S. G. ; Kim, K. H. ; Song, S. H. ; Kim, H. S.
Pub. info.: Nanoengineering: fabrication, properties, optics, and devices II : 3-4 August, 2005, San Diego, California.  pp.59310I-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5931
2.

Conference Proceedings
Conference Proceedings
2. Properties of phosphorus-doped ZnO and (Zn,Mg)O thin films via pulsed laser deposition [5941-66]
Li, Y. J. ; Heo, Y. W. ; Erie, J. M. ; Kim, H. S. ; Ip, K. ; Pearton, S. J. ; Norton, D. P.
Pub. info.: Fifth international conference on solid state lighting : 1-4 August 2005, San Diego, California, USA.  pp.59411T-,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5941
3.

Conference Proceedings
Conference Proceedings
3. Noise reduction using smart panel with shunt circuit [6166-59]
Zhao, L. J. ; Kim, H. S. ; Kim, J.
Pub. info.: Smart structures and materials 2006 : Modeling, signal processing, and control : 27 February-2 March 2006, San Diego, California, USA.  pp.61661M-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6166
4.

Conference Proceedings
Conference Proceedings
4. Technological assessment of sensing systems in propulsion systems in high temperature zones [6179-08]
Ghoshal, A. ; Kim, H. S.
Pub. info.: Advanced sensor technologies for nondestructive evaluation and structural health monitoring II : 1-2 March 2006, San Diego, California, USA.  pp.617908-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6179
5.

Conference Proceedings
Conference Proceedings
5. Recovery of H2S in coke oven gas as elemental sulfur and ammonium sulfate by catalytic oxidation
Park, D. W. ; Chun, S. W. ; Kim, H. S. ; Woo, H. C. ; Chung, J. S.
Pub. info.: Science and technology in catalysis 1998 : proceedings of the Third Tokyo Conference on Advanced Catalytic Science and Technology, Tokyo, July 19-24, 1998.  pp.457-,  1999.  Tokyo.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 121
6.

Conference Proceedings
Conference Proceedings
6. The Use of Chemical Coupling Agents to Improve the Performance of Polymer Bonded Nd-Fe-B Magnets
Xiao, J. ; Kim, H. S. ; Otaigbe, J. ; Tacke, T.
Pub. info.: ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia.  1  pp.1337-1341,  1999.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 45(1)
7.

Conference Proceedings
Conference Proceedings
7. Impact Test with Flat-Ended Impactor for Mouthguard Materials Specimen Size Effect
Kim, H. S. ; Stojcevski, S.
Pub. info.: Conference proceedings at ANTEC '98 : plastics on my mind, Society of Plastics Engineers, Atlanta, Georgia, April 26-April 30, 1998.  3  pp.2738-2742,  1998.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 44(3)
8.

Conference Proceedings
Conference Proceedings
8. Characterization of piezoelectric effect and mechanical properties of cellulose based electro-active paper actuator [6170-60]
Kim, H. S. ; Jung, W. ; Kim, J. ; Yang, C. ; Song, K. H.
Pub. info.: Smart structures and materials 2006 : Active materials: behavior and mechanics : 27 February-2 March 2006, San Diego, California, USA.  pp.61701N-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6170
9.

Conference Proceedings
Conference Proceedings
9. Rubbing Mechanisms of Polymers on Metal Surface Relevant to Extrusion
Kim, H. S. ; Chung, C. I. ; Butler, T. I.
Pub. info.: ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida.  pp.124-128,  2000.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 46
10.

Conference Proceedings
Conference Proceedings
10. Synthesis and Electrochemical Study of Zr-Doped LiNixMnyCo(1-x-y)O2 as Cathode Material for Secondary Li-Ion Battery
Na, S. H. ; Kim, H. S. ; Moon, S. I.
Pub. info.: Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea.  pp.614-617,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 486-487
11.

Conference Proceedings
Conference Proceedings
11. Rheological Investigation of Effect of Coupling Agent and Particle Size on Processing of Polymer-Bonded Magnets
Otaigbe, J. ; Kim, H. S. ; Xiao, J. ; Tacke, T.
Pub. info.: ANTEC '99 Conference proceedings, New York City, May 2-6, 1999 : plastics bridging the millennia.  3  pp.3936-3940,  1999.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 45(3)
12.

Conference Proceedings
Conference Proceedings
12. Dependence of Melting Behavior on Melt Index
Hong, B. K. ; Kim, H. S. ; Chung, C. I.
Pub. info.: ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10.  pp.272-276,  2001.  Brookfield Center, CT.  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 47
13.

Conference Proceedings
Conference Proceedings
13. Role of Alloying Elements on the Cytotoxic Behavior and Corrosion of Austenitic Stainless Steels
Kim, Y. S. ; Yoo, Y. R. ; Sohn, C. G. ; Oh, K. T. ; Kim, K. N. ; Yoon, J. H. ; Kim, H. S.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.2295-2298,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(3)
14.

Conference Proceedings
Conference Proceedings
14. Design of piezoelectric shunt structures using admittance analysis[6173-29]
Park J -S ; Kim, H. S. ; Sohn W J ; Choi S -B
Pub. info.: Smart structures and materials 2006 : Smart structures and integrated systems : 27 February-2 March 2006, San Diego, California, USA.  pp.61730S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6173
15.

Conference Proceedings
Conference Proceedings
15. Development of PP-Based Nanocomposites via in-situ Copolymerization and Melt Intercalation with the Power Ultrasonic Wave
Ryul, J. G. ; Lee, P. S. ; Lee, J. W. ; Kim, H. S.
Pub. info.: ANTEC 2001, conference proceedings, Dallas, Texas, May 6-10.  pp.2135-2139,  2001.  Brookfield Center, CT.  Society of Plastics Engineers
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 47
16.

Conference Proceedings
Conference Proceedings
16. Piezoelectric Effects in GaN/AlGaN Multiple Quantum Wells Probed by Picosecond Time-Resolved Photoluminescence
Kim, H. S. ; Lin, J. Y. ; Jiang, H. X. ; Chow, W. W. ; Botchkarev, A. ; Morkoc, H.
Pub. info.: GaN and related alloys : symposium held November 30-December 4, 1998, Boston, Massachusetts, U.S.A..  pp.G3.3.1-,  1999.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 537
17.

Conference Proceedings
Conference Proceedings
17. Effects of Rapid Thermal Annealing on CdTe/CdS Solar Cell Fabrication
Cho, Y. A. ; Nam, W. J. ; Kim, H. S. ; Yeom, G. Y. ; Yoon, J. K. ; Oho, K. H. ; Shin, S. H. ; Park, K. J.
Pub. info.: Thin films for photovoltaic and related device applications.  pp.379-,  1996.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 426
18.

Conference Proceedings
Conference Proceedings
18. Etch Characteristics of GaN Using Inductively-Coupled Cl2/HBr and Cl2/Ar Plasmas
Kim, H. S. ; Lee, Y. J. ; Lee, Y. H. ; Lee, J. W. ; Yoo, M. C. ; Kim, T. I. ; Yeom, G. Y.
Pub. info.: Gallium nitride and related materials II : symposium held April 1-4, 1997, San Francisco, California, U.S.A..  pp.367-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 468
19.

Conference Proceedings
Conference Proceedings
19. Transient analysis of delaminated smart composite structures by incorporating Fermi-Dirac distribution function
Kim, H. S. ; Ghoshal, A. ; Kim, J. ; Choi, S. -B.
Pub. info.: Smart structures and materials 2005 : Modeling, signal processing, and control : 7-9 March 2005, San Diego, California, USA.  pp.523-534,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5757
20.

Conference Proceedings
Conference Proceedings
20. Microwave Dielectric Properties of LTCC Materials Consisting of BaO-TiO2-SiO2-Al2O3 Glass-BaNd2Ti5O14 Ceramic Composites
Kim, Y. J. ; Hwang, S. J. ; Kim, H. S.
Pub. info.: Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea.  pp.506-509,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 486-487
21.

Conference Proceedings
Conference Proceedings
21. Ionic liquid-derived imidazolium metal halides for the coupling reaction of ethylene oxide and CO2
Kwon, O. -S. ; Palgunadi, J. ; Lee, H. ; Bae, J. Y. ; Ahn, B. S. ; Kim, H. S. ; Lee, S. -H.
Pub. info.: Carbon dioxide utilization for global sustainability : proceedings of the 7th International Conference on Carbon Dioxide Utilization, Seoul, Korea, 12-16 October 2003.  pp.233-238,  2004.  Amsterdam, The Netherland.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 153
22.

Conference Proceedings
Conference Proceedings
22. SCANNING TUNNELING MICROSCOPE STUDY OF CADMIUM TELLURIDE
Kim, H. S. ; Zheng, Y. C. ; Bryant, P. J.
Pub. info.: Epitaxy of semiconductor layered structures : symposium held November 30-December 4, 1987, Boston, Massachusetts, U.S.A..  pp.109-112,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 102
23.

Conference Proceedings
Conference Proceedings
23. Advanced thermal imaging system for tank sights
Hong, S. M. ; Kim, H. S. ; Yu, W. K. ; Lee, G. H. ; Yoon, E. S. ; Park, Y. C. ; Choi, S. C. ; Lee, J. H.
Pub. info.: Infrared technology and applications XXXI : 28 March-1 April 2005, Orlando, Florida, USA.  pp.932-942,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5783
24.

Conference Proceedings
Conference Proceedings
24. Friedel-crafts alkylation over Al-incorporated mesoporous honeycomb
Ahn, Y. -S. ; Kim, H. S. ; Han, M. H. ; Jun, S. ; Joo, S. H. ; Ryoo, R. ; Cho, S. J.
Pub. info.: Nanotechnology in mesostructured materials : proceedings of the 3rd International Mesostructured Materials Symposium, Jeju, Korea, July 8-11, 2002.  pp.669-672,  2003.  Amsterdam.  Elsevier
Title of ser.: Studies in surface science and catalysis
Ser. no.: 146
25.

Conference Proceedings
Conference Proceedings
25. A Study on Hydrogen Desorption Properties of Multiwall Carbon Nanotubes
Lee, J. Y. ; Lee, H. ; Kim, H. S.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.2463-2468,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(3)
26.

Conference Proceedings
Conference Proceedings
26. On the Modelling of Ultra-Fine Grained Materials
Bush, M. B. ; Kim, H. S.
Pub. info.: Metastable, mechanically alloyed and nanocrystalline materials : ISMANAM 98 : proceedings of the International Symposium on Metastable, Mechanical Alloyed and Nanocrystalline Materials (ISMANAM 98), held in Wollongong(Sydney), Australia, December 1998.  pp.437-442,  1999.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 312-314
27.

Conference Proceedings
Conference Proceedings
27. High-Temperature Wear Properties of the Nitrided Alloys for Steam Turbine Valve System Parts
Kim, I. S. ; Kim, H. S. ; Hur, I. C. ; Son, K. S. ; Lee, J. H. ; Yoon, J. H.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.4133-4136,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(5)
28.

Conference Proceedings
Conference Proceedings
28. Water Vapor Oxidation Behavior under High-Temperature and Pressure Conditions of the Nitrided Alloys for Steam Turbine Valve System Parts
Yoon, J. H. ; Kim, I. S. ; Kim, H. S. ; Hur, I. C. ; Son, K. S. ; Lee, J. H.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.4129-4132,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(5)
29.

Conference Proceedings
Conference Proceedings
29. Corrosion Behavior of 316L Stainless Steel in Supercritical Water Environment
Yoon, J. H. ; Son, K. S. ; Kim, H. S. ; Mitton, B. ; Latanision, R. ; Yoo, Y. R. ; Kim, Y. S.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.4207-4210,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(5)
30.

Conference Proceedings
Conference Proceedings
30. Grain Refinement and Texture Evolution in AZ31 Alloy during ECAP Process and Their Effects on Mechanical Properties
Kim, H. S. ; Jeong, H. T. ; Jeong, H. G. ; Kim, W. J.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, Chin.  pp.549-554,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(1)
31.

Conference Proceedings
Conference Proceedings
31. Photocatalytic Activities of Plasma Sprayed TiO2-Based Coatings
Chen, H. ; Lee, S. W. ; Kim, H. S. ; Lee, E. A. ; Kim, T. H. ; Shin, J. H. ; Aum, H. S. ; Hur, B. Y.
Pub. info.: Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea.  pp.49-52,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 486-487
32.

Conference Proceedings
Conference Proceedings
32. Bond Strength of Plasma Sprayed Chromium Oxide Coatings
Kim, H. S. ; Yang, H. H. ; Oh, I. H. ; Kim, S. S.
Pub. info.: Functionally graded materials 1998 : proceedings of the 5th International Symposium on Functionally Graded Materials, held in New Town Hall, Dresden, Germany, October 26-29, 1998.  pp.226-231,  1999.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 308-311
33.

Conference Proceedings
Conference Proceedings
33. Crystallization during Superplastic Deformation in a Zr65Al10Ni10Cu15 Glass Metallic Alloy
Kim, W. J. ; Kim, H. S. ; Jeong, H. G.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.2981-2986,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(4)
34.

Conference Proceedings
Conference Proceedings
34. In Situ HREM Study on the Thermal Stability of Atomic Layer Epitaxy Grown InAs/GaAs Quantum Dots
Kim, H. S. ; Suh, J. H. ; Park, C. G. ; Lee, S. J. ; Noh, S. K. ; Song, J. D. ; Park, Y. J. ; Choi, W. J. ; Lee, J. I.
Pub. info.: Electron microscopy of molecular and atom-scale mechanical behavior, chemistry and structure : symposium held November 29-December 1, 2004, Boston, Massachusetts, U.S.A..  pp.195-200,  2005.  Warrendale, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 839
35.

Conference Proceedings
Conference Proceedings
35. Comparison of Transmittance of Pb-Free Transparent Dielectric Made by Screen Printer and Die Coater
Cha, M. L. ; Jeon, J. S. ; Kim, H. S.
Pub. info.: Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea.  pp.325-328,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 486-487
36.

Conference Proceedings
Conference Proceedings
36. Numerical and Experimental Study of the Electromagnetic Continuous Casting of Silicon
Shin, J. S. ; Kim, H. S. ; Lee, S. M. ; Moon, B. M.
Pub. info.: PRICM 5 : the Fifth Pacific Rim International Conference on Advanced Materials and Processing, November 2-5, 2004, Beijing, China.  pp.2671-2674,  2005.  Uetikon-Zuerich.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 475-479(4)
37.

Conference Proceedings
Conference Proceedings
37. Effect of Ternary Alloying Elements on Microstructure and Mechanical Property of Nb-Si Based Refractory Intermetallic Alloy
Kim, W. Y. ; Kim, H. S. ; Kim, S. K. ; Ra, T. Y. ; Kim, M. S.
Pub. info.: Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea.  pp.342-345,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 486-487
38.

Conference Proceedings
Conference Proceedings
38. Optical Properties of Bi2O3-ZnO-SiO2 Glass System for Eco Transparent Dielectric in PDP
Jeon, J. S. ; Cha, M. R. ; Kim, H. S.
Pub. info.: Eco-materials processing & design VI : proceedings of the 6th International Symposium on Eco-Materials Processing & Design, January 16-18, 2005, Jinju, Korea.  pp.321-324,  2005.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 486-487
39.

Conference Proceedings
Conference Proceedings
39. Low Temperature Selective Si Epitaxy By Reduced Pressure Chemical Vapor Deposition Introducing Periodic Deposition And Etching Cycles With SiH4, H2 And HC1
Kang, J. Y. ; Kim, H. S. ; Lee, J. Y. ; Shim, K. H.
Pub. info.: Amorphous and heterogeneous silicon thin films - 2000 : symposium held April 24-28, 2000, San Francisco, California, U.S.A..  pp.A8.2-,  2001.  Warrendale.  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 609
40.

Conference Proceedings
Conference Proceedings
40. Impact Test with Flat-Ended Impactor for Protective Materials: Specimen Thickness Effect
Kim, H. S. ; Shafig, R. M.
Pub. info.: ANTEC 2000 Conference proceedings, May 7-11, 2000, Orlando, Florida.  pp.1499-1503,  2000.  Brookfield Center, CT.  Society of Plastics Engineers, Inc. (SPE)
Title of ser.: Annual Technical Conference - ANTEC : Society of Plastics Engineers Annual Technical Papers
Ser. no.: 46
41.

Technical Paper
Technical Paper
41. Collapse Analysis of Space-Framed Vehicle Models by Finite Element Limit Analysis
Kim, H. S. ; Huh, H.
Pub. info.: 1998 SAE International Congress and Exposition : technical paper.  pp.97-103,  1998.  Warrendale, Penn..  Society of Automotive Engineers
Title of ser.: Society of Automotive Engineers technical paper series
Ser. no.: 1998
42.

Conference Proceedings
Conference Proceedings
42. Synthesis and characterization of (Zn,Mg)O:P/ZnO heterostructures [6122-24]
Li, Y. ; Erie, J. M. ; Kim, H. S. ; Pearton, S. J ; Norton, D. P. ; Chen, J. J. ; Ren, F.
Pub. info.: Zinc Oxide Materials and Devices.  pp.61220R-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6122
43.

Conference Proceedings
Conference Proceedings
43. Heterogeneous diffusion model for simulation of resist process [6154-104]
Lim, C. M. ; Park, J. T. ; Kim, S. M. ; Kim, H. S. ; Moon, S. C.
Pub. info.: Optical Microlithography XIX.  pp.61542S-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6154