1.

Conference Proceedings
Conference Proceedings
1. A curvature sensor using white-light scanning interferometry [6292-48]
Kim, B. ; Kim, S. ; Kwon, Y. ; Lee, Y. ; Yang, H. ; Rhee, H.
Pub. info.: Interferometry XIII: Techniques and Analysis.  pp.629219-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6292
2.

Conference Proceedings
Conference Proceedings
2. Study of the beam blur and its effect on the future mask fabrication [6349-33]
Lee, S. ; Park, S. ; Ahn, M. ; Doh, J. ; Kim, S. ; Kim, B. ; Choi, S. ; Han, W.
Pub. info.: Photomask Technology 2006.  pp.63490X-,  2006.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 6349