1.

Conference Proceedings
Conference Proceedings
1. EVIDENCE FOR OXYGEN CONCENTRATION CHANGES INDUCED BY LOW-TEMPERATURE 0-18 IMPLANTATION INTO A SIMOX BURIED-OXIDE LAYER
Scalon, P. J. ; Hemment, P. L. F. ; Robinson, A. K. ; Reeson, K. J. ; Chater, R. J. ; Kilner, J. A. ; Harbeke, G.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.141-146,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
2.

Conference Proceedings
Conference Proceedings
2. DETERMINATION OF THE NITROGEN CONTENT OF AS-IMPLANTED AND ANNEALED SIMOX SUBSTRATES
Kilner, J. A. ; Chater, R. J. ; Biswas, S. ; Hemment, P. L. F. ; Reeson, K. J.
Pub. info.: Silicon-on-insulator and buried metals in semiconductors : symposium held November 30-December 3, 1987, Boston, Massachusetts, U.S.A..  pp.151-156,  1988.  Pittsburgh, Pa..  Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 107
3.

Conference Proceedings
Conference Proceedings
3. CHARACTERIZATION OF DEVICE GRADE SOI STRUCTURES FORMED BY IMPLANTATION OF HIGH DOSES OXYGEN
Hemment, P. L. F. ; Maydell-Ondrusz, E. A. ; Stephens, K. G. ; Arrowsmith, R. P. ; Glaccum, A> C. ; Kilner, J. A. ; Butcher, J. B.
Pub. info.: Ion implantation and ion beam processing of materials : symposium held November 1983 in Boston, Massachusetts, U.S.A..  pp.281-286,  1984.  New York.  North-Holland
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 27