1.

Conference Proceedings
Conference Proceedings
1. Effect of beam blur in mask fabrication
Yang,S.-H. ; Ki,W.-T. ; Moon,S.-Y. ; Jeong,T.-M. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.468-473,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186
2.

Conference Proceedings
Conference Proceedings
2. Dose latitude dependency on resist contrast in e-beam mask lithography
Cha,B.-C. ; Moon,S.-Y. ; Ki,W.-T. ; Yang,S.-H. ; Choi,S.-W. ; Han,W.-S. ; Yoon,H.-S. ; Sohn,J.-M.
Pub. info.: Photomask and Next-Generation Lithography Mask Technology VII.  pp.200-209,  2000.  Bellingham, Wash..  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4066
3.

Conference Proceedings
Conference Proceedings
3. Analysis of photomask distortion caused by blank materials and open ratios
Moon,S.-Y. ; Ki,W.-T. ; Yang,S.-H. ; Jeong,T.-M. ; Choi,S.-W. ; Han,W.-S. ; Sohn,J.-M.
Pub. info.: 20th Annual BACUS Symposium on Photomask Technology.  pp.227-232,  2000.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4186