1.
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Conference Proceedings
|
Kwong, R.W. ; Khojasteh, M. ; Lawson, P. ; Hughes, T. ; Varanasi, P.R. ; Brunsvold, B. ; Allen, R.D. ; Brock, P.J. ; Sooriyakumaran, R. ; Truong, H.D. ; Mahorowala, A.P. ; Medeiros, D.R.
Pub. info.: |
Advances in Resist Technology and Processing XIX. Part One pp.403-409, 2002. Bellingham, Wash.. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
4690 |
|
2.
|
Conference Proceedings
|
Khojasteh, M. ; Chen, K.R. ; Kwong, R.W. ; Lawson, M.C. ; Varanasi, P.R. ; Patel, K.S. ; Kobayashi, E.
Pub. info.: |
Advances in Resist Technology and Processing XX. 1 pp.187-194, 2003. Bellingham, CA. SPIE-The International Society for Optical Engineering |
Title of ser.: |
Proceedings of SPIE - the International Society for Optical Engineering |
Ser. no.: |
5039 |
|