Chow, C.F. ; Gao, Y. ; Wong, S.P. ; Ke, N. ; Li, Q. ; Cheung, W.Y. ; Shao, G. ; Lourenco, M.A. ; Homewood, K.P.
Pub. info.:
Amorphous and nanocrystalline silicon science and technology - 2005 : symposium held March 28-April 1, 2005, San Francisco, California, U.S.A.. pp.507-512, 2005. Warrendale, Pa.. Materials Research Society
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia. pp.19-25, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Chow, C. F. ; Gao, Y. ; Wang, S. P. ; Ke, N. ; Li, Q. ; Cheung, W. Y. ; Shao, G. ; Lourenco, M. A. ; Homewood, K. P.
Pub. info.:
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II. pp.17-22, 2004. Bellingham, Wash.. SPIE - The International Society of Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering