1.

Conference Proceedings
Conference Proceedings
1. Attenuated phase-shifting mask specification with modified beam illumination
Kagami,I. ; Sugawara,M. ; Kawahira,H. ; Tsudaka,K. ; Ishikawa,K. ; Nozawa,S.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.445-456,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621
2.

Conference Proceedings
Conference Proceedings
2. Defect printability study of attenuated phase-shifting masks for specifying inspection sensitivity
Sugawara,M. ; Ishikawa,K. ; Kawahira,H. ; Kagami,I. ; Nozawa,S.
Pub. info.: 15th Annual BACUS Symposium on Photomask Technology and Management.  pp.457-472,  1995.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2621
3.

Conference Proceedings
Conference Proceedings
3. Chemically amplified resist process for 0.25-ｦﾌm-generation photomasks
Katsumata,M. ; Kawahira,H. ; Sugawara,M. ; Nozawa,S.
Pub. info.: 16th Annual BACUS Symposium on Photomask Technology and Management.  pp.83-91,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2884
4.

Conference Proceedings
Conference Proceedings
4. Influence of process latitude on exposure characteristics
Sugawara,M. ; Kawahira,H. ; Nozawa,S.
Pub. info.: Optical Microlithography IX.  Part2  pp.583-597,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2726
5.

Conference Proceedings
Conference Proceedings
5. Chemically amplified resist process for 0.25-ｦﾌm generation photomasks
Katsumata,M. ; Kawahira,H. ; Sugawara,M. ; Nozawa,S.
Pub. info.: Photomask and X-Ray Mask Technology III.  pp.96-104,  1996.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 2793