1.

Conference Proceedings
Conference Proceedings
1. Compositional Effects on the Degradation of PVD-TiSiN
McArthur, W. F. ; Deng, F. ; Ring, K. ; Pattison, P. M. ; Kavanagh, K. L.
Pub. info.: Polycrystalline thin films : structure, texture, properties and applications III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A..  pp.325-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 472
2.

Conference Proceedings
Conference Proceedings
2. Effect of Oxygen on the Degradation of Ti-Si-N Diffusion Barriers in Cu Metallization
McArthur, W. F. ; Ring, K. M. ; Morgan, B. ; Hurst, Q. ; Serber, D. ; Clark, A. ; Kavanagh, K. L.
Pub. info.: Advanced interconnects and contact materials and processes for future integrated circuits : symposium held April 13-16, 1998, San Francisco, California, U.S.A..  pp.321-,  1998.  Warrendale, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 514
3.

Conference Proceedings
Conference Proceedings
3. Structural and Electrical Characterization of Si-Implanted TiN as a Diffusion Barrier for Cu Metallization
McArthur, W. F. ; Ring, K. M. ; Kavanagh, K. L.
Pub. info.: Materials reliability in microelectronics V : symposium held April 17-21, 1995, San Francisco, California, U.S.A..  pp.327-,  1995.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 391
4.

Conference Proceedings
Conference Proceedings
4. Compositional Effects on the Degradation of PVD-TiSiN
McArthur, W. F. ; Deng, F. ; Ring, K. ; Pattison, P. M. ; Kavanagh, K. L.
Pub. info.: Materials reliability in microelectronics VII : symposium held April 8-12, 1997, San Francisco, California, U.S.A..  pp.241-,  1997.  Pittsburgh, Pa..  MRS - Materials Research Society
Title of ser.: Materials Research Society symposium proceedings
Ser. no.: 473