Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society
Silicon carbide 2002 -- materials, processing and devices : symposium held December 2-4, 2002, Boston, Massachusetts, U.S.A.. pp.23-28, 2003. Warrendale, Pa.. Materials Research Society
Bogdanov, M.V. ; Karpov, S.Yu. ; Kulik, A.V. ; Ramm, M.S. ; Makarov, Yu.N. ; Schlesser, R. ; Dalmau, R.F. ; Sitar, Z.
Pub. info.:
GaN and related alloys - 2002 : symposium held December 2-6, Boston, Massachusetts, U.S.A.. pp.187-192, 2002. Warrendale, Pa.. Materials Research Society
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society
Semennikov, A.K. ; Karpov, S.Yu. ; Ramm, M.S. ; Romanov, A.E. ; Makarov, Yu.N.
Pub. info.:
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.383-386, 2004. Uetikon-Zuerich. Trans Tech Publications
Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Karpov, S.Yu. ; Ramm, M.S. ; Segal, A.S. ; Makarov, Yu.A. ; Helava, H.
Pub. info.:
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.979-982, 2003. Zuerich, Switzerland. Trans Tech Publications
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium. pp.229-236, 2001. Pennington, N.J.. Electrochemical Society
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.63-66, 2004. Uetikon-Zuerich. Trans Tech Publications
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003. pp.67-70, 2004. Uetikon-Zuerich. Trans Tech Publications
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.297-300, 2003. Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.37-40, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.107-110, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.57-60, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Karpov, S.Yu. ; Kulik, A.V. ; Ramm, M.S. ; Mokhov, E.N. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Makarov, Yu.N.
Pub. info.:
Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000. pp.779-782, 2001. Uetikon-Zuerich, Switzerland. Trans Tech Publications
Mokhov, E.N. ; Ramm, M.G. ; Ramm, M.S. ; Roenkov, A.D. ; Vodakov, Yu.A. ; Karpov, S.Yu. ; Makarov, Yu.A. ; Helava, H.
Pub. info.:
Silicon carbide and related materials 2002 : ECSCRM2002, proceedings of the 4th European Conference on Silicon Carbide and Related Materials, September 2-5, 2002, Linköping, Sweden. pp.29-32, 2003. Zuerich, Switzerland. Trans Tech Publications