Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
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Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.567-577, 2002. Pennington, NJ. Electrochemical Society