1.

Conference Proceedings

Conference Proceedings
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu.N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.567-577,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2
2.

Conference Proceedings

Conference Proceedings
Segal, A. ; Sid'ko, A.P. ; Karpov, S.Yu. ; Makarov, Yu. N.
Pub. info.: Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology.  pp.567-577,  2002.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2002-2