Karoui, A. ; Karoui, F.S. ; Rozgonyi, G.A. ; Hourai, M. ; Sueoka, K.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.670-681, 2002. Pennington, NJ. Electrochemical Society
Karoui, A. ; Karoui, F.S. ; Rozgonyi, G.A. ; Hourai, M. ; Sueoka, K.
Pub. info.:
Semiconductor silicon 2002 : proceedings of the ninth International Symposium on Silicon Materials Science and Technology. pp.670-681, 2002. Pennington, NJ. Electrochemical Society