1.
Conference Proceedings
Kang,D. ; Robertson,S.A. ; Reilly,M.T. ; Pavelchek,E.K.
Pub. info.:
Lithography for semiconductor manufacturing II : 30 May-1 June, 2001, Edinburgh, UK . pp.170-179, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4404
2.
Conference Proceedings
Kang,D. ; Robertson,S.A. ; Reilly,M.T. ; Pavelchek,E.K.
Pub. info.:
Optical Microlithography XIV . 4346 pp.858-868, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4346
3.
Conference Proceedings
Reilly,M.T. ; Robertson,S.A. ; Parker,C.R. ; Kang,D. ; Dusa,M.V. ; MacDonald,S.S. ; West,C.A.
Pub. info.:
21st Annual BACUS Symposium on Photomask Technology . 4562 pp.948-953, 2001. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4562