1.

Conference Proceedings
Conference Proceedings
1. Dry Oxidation and Implant Anneal in a Single Wafer Rapid Thermal Furnace
Fukada, T. ; Yoo, W.S. ; Hiraga, Y. ; Kang, K. ; Kitayama, H.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.113-120,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
2.

Conference Proceedings
Conference Proceedings
2. Spin-on-Glass Bake and Cure Using a Resistively Heated Batch Annealing Oven
Yoo, W.S. ; Fukada, T. ; Hiraga, Y. ; Kang, K. ; Yamamoto, J.
Pub. info.: Rapid thermal and other short-time processing technologies II : proceedings of the international symposium.  pp.401-408,  2001.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-9
3.

Conference Proceedings
Conference Proceedings
3. Ultra-Shallow Junction Implant Anneal Using Xenon Arc Flash Lamps
Yoo, W.S. ; Kang, K.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.3-10,  2004.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2004-01
4.

Conference Proceedings
Conference Proceedings
4. 15 Ultra-shallow implant anneal using a short-wavelength flash light source
Yoo, W.S. ; Kang, K.
Pub. info.: Advanced short-time thermal processing for Si-based CMOS devices : proceedings of the international symposium.  pp.111-118,  2003.  Pennington, NJ.  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2003-14