Kanayama, T. ; Shimizu, T. ; Kojima, H. ; Omote, N. ; Sunouchi, S. ; Hayashi, K.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.147-151, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Hayashi, K. ; Konno, H. ; Kojima, H. ; Minato, M. ; Oseki, T. ; Kawamura, Y. ; Kameko, K. ; Kanayama, T.
Pub. info.:
Third International Symposium on Laser Precision Microfabrication : proceedings : 27-31 May, 2002, Osaka, Japan. pp.142-146, 2003. Bellingham, Wash., USA. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering