1.
Conference Proceedings
Tsai,W. ; Qian,Q. ; Buckmann,K.M. ; Cheng,W.-H. ; He,L. ; Irvine,B. ; Kamna,M. ; Korobko,Y. ; Kovalchick,M. ; Labovitz,S.M. ; Talevi,R. ; Farnsworth,J.N.
Pub. info.:
20th Annual BACUS Symposium on Photomask Technology . pp.433-443, 2000. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4186
2.
Conference Proceedings
Tsai,W. ; Chen,F. ; Kamna,M. ; Chegwidden,S. ; Labovitz,S.M. ; Farnsworth,J.N. ; Dao,G.T.
Pub. info.:
Photomask and X-Ray Mask Technology V . pp.149-162, 1998. Bellingham, Wash.. SPIE-The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3412
3.
Conference Proceedings
Chen,F. ; Tsai,W. ; Chegwidden,S. ; Yu,S. ; Kamna,M. ; Farnsworth,J.N. ; Coleman,T.P.
Pub. info.:
18th Annual BACUS Symposium on Photomask Technology and Management . pp.429-437, 1998. Bellingham, Wash.. SPIE - The International Society for Optical Engineering
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3546