1.

Conference Proceedings

Conference Proceedings
Selder, M. ; Kadinski, L. ; Durst, F. ; Straubinger, T. L. ; Hofmann, D. ; Wellmann, P. J.
Pub. info.: Silicon carbide and related materials - 1999 : ICSCRM'99, proceedings of the International Conference on Silicon Carbide and Related Materials - 1999, Research Triangle Park, North Carolina, USA, October 10-15, 1999.  pp.31-34,  2000.  Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 338-342(1)
2.

Conference Proceedings

Conference Proceedings
Wunder, V.K. ; Popovska, N. ; Gerhard, H. ; Emig, G. ; Kadinski, L. ; Durst, F.
Pub. info.: Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium.  pp.300-307,  2001.  Pennington, N.J..  Electrochemical Society
Title of ser.: Electrochemical Society Proceedings Series
Ser. no.: 2001-13
3.

Conference Proceedings

Conference Proceedings
Selder, M. ; Kadinski, L. ; Durst, F. ; Straubinger, T.L. ; Wellmann, P.J. ; Hofmann, D.
Pub. info.: Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000.  pp.65-68,  2001.  Uetikon-Zuerich, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 353-356