1.
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Conference Proceedings
|
J. Kim ; J. McVittie ; K. Saraswat ; Y. Nishi ; S. Liu
Pub. info.: |
SiGe and Ge, materials, processing, and devices. pp.1191-1196, 2006. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
3(7) |
|
2.
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Conference Proceedings
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T. Krishnamohan ; D. Kim ; Y. Nishi ; K. Saraswat ; C. Jungemann
Pub. info.: |
SiGe and Ge, materials, processing, and devices. pp.687-695, 2006. Pennington, N.J.. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
3(7) |
|
3.
|
Conference Proceedings
|
J. Kim ; K. Saraswat ; Y. Nishi
Pub. info.: |
Cleaning Technology in Semiconductor Device Manufacturing IX. pp.214-219, 2006. Pennington, NJ. Electrochemical Society |
Title of ser.: |
ECS transactions |
Ser. no.: |
1(3) |
|