1.

Conference Proceedings
Conference Proceedings
1. Low Energy Electron Channeling Contrast Imaging from 4H-SiC Surface by SEM and its Comparison with CDIC-OM and PL Imaging
K. Ashida ; T. Aiso ; M. Okamoto ; H. Seki ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.193-196,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897
2.

Conference Proceedings
Conference Proceedings
2. Improving Mechanical Strength and Surface Uniformity to Prepare High Quality Thinned 4H-SiC Epitaxial Wafer Using Si-Vapor Etching Technology
S. Torimi ; K. Ashida ; N. Yabuki ; M. Shinohara ; T. Sakaguchi ; Y. Teramoto ; S. Nogami ; M. Kitabatake ; T. Kaneko
Pub. info.: Silicon Carbide and Related Materials 2016.  pp.375-378,  2017.  Aedermannsdorf, Switzerland.  Trans Tech Publications
Title of ser.: Materials science forum
Ser. no.: 897