1.

Conference Proceedings
Conference Proceedings
1. Integrating Philips' extreme UV source in the alpha-tools
Jaworski, M. A. ; Williams, M. J. ; Antonsen, E. L. ; Jurczyk, B. E. ; Ruzic, D. N. ; Bristol, R.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.260-271,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751
2.

Conference Proceedings
Conference Proceedings
2. Ion beam imprinting system
Alman, D. A. ; Qiu, H. ; Thompson, K. C. ; Antonsen, E. L. ; Spencer, J. B. ; Hendricks, M. R. ; Jurczyk, B. E. ; Ruzic, D. N. ; Spila, T. ; Edwards, G. ; Wurm, S. ; Wood, O. ; Bristol, R.
Pub. info.: Emerging lithographic technologies IX : 1-3 March 2005, San Jose, California, USA.  pp.548-555,  2005.  Bellingham, Wash..  SPIE - The International Society of Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 5751