1.

Conference Proceedings

Conference Proceedings
Seebacher,S. ; Osten,W. ; Juptner,W.P. ; Veiko,V.P. ; Voznessenski,N.B.
Pub. info.: Optical devices and diagnostics in materials science, 1-4 August 2000, San Diego, USA.  pp.110-120,  2000.  Bellingham, Wash., USA.  SPIE - The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4098
2.

Conference Proceedings

Conference Proceedings
Osten,W. ; Seebacher,S. ; Baumbach,T. ; Juptner,W.P.
Pub. info.: Metrology-based Control for Micro-Manufacturing.  pp.71-84,  2001.  Bellingham, Wash..  SPIE-The International Society for Optical Engineering
Title of ser.: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.: 4275